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I-304 yensimbi engenasici 8 * 0.7mm Isenzo sokushisa kwizakhiwo ezinomaleko ezenziwe ngokuphazamiseka ngokuthe ngqo kwelaser.

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Ukuphazamiseka okuthe ngqo kwe-laser (DLIP) edityaniswe ne-laser-induced periodic surface structure (LIPSS) ivumela ukudalwa kwezinto ezisebenzayo kwizinto ezahlukeneyo.I-throughput yenkqubo idla ngokunyuswa ngokusebenzisa umndilili ophezulu welaser amandla.Nangona kunjalo, oku kukhokelela ekuqokeleleni ukushisa, okuchaphazela uburhabaxa kunye nokumila kwepateni yomhlaba ophumelayo.Ngoko ke, kuyimfuneko ukufunda ngokubanzi impembelelo yokushisa kwe-substrate kwi-morphology yezinto ezenziweyo.Kule sifundo, umgangatho wensimbi wawunomgca-umgca kunye ne-ps-DLIP kwi-532 nm.Ukuphanda umphumo wokushisa kwe-substrate kwi-topography ephumela, i-plate yokufudumeza yayisetyenziselwa ukulawula ukushisa.Ukufudumeza ukuya kwi-250 \ ( ^ {\ circ } \) С kukhokelela ekunciphiseni okukhulu kubunzulu bezakhiwo ezenziweyo ukusuka kwi-2.33 ukuya kwi-1.06 µm.Ukuncipha kwakunxulunyaniswa nokubonakala kweentlobo ezahlukeneyo ze-LIPSS ngokuxhomekeke kwi-orientation yeenkozo ze-substrate kunye ne-laser-induced surface oxidation.Olu phononongo lubonisa isiphumo esinamandla sobushushu be-substrate, ekulindeleke kwakhona xa unyango lomphezulu lwenziwa kumndilili ophezulu welaser ukudala iziphumo zokuqokelela ubushushu.
Iindlela zonyango zomphezulu ezisekelwe kwi-ultrashort pulse laser irradiation ziphambili kwisayensi kunye neshishini ngenxa yokukwazi kwabo ukuphucula iimpawu zomphezulu zezona zinto zibalulekileyo ezifanelekileyo1.Ngokukodwa, i-laser-induced custom surface performance is state-of-the-art kuluhlu olubanzi lwamacandelo oshishino kunye neemeko zesicelo1,2,3.Ngokomzekelo, uVercillo et al.Iimpawu ezichasene ne-icing ziye zaboniswa kwi-titanium alloys kwizicelo ze-aerospace ezisekelwe kwi-laser-induced superhydrophobicity.U-Epperlein et al uxele ukuba iimpawu ze-nanosized eziveliswa yi-laser surface structuring zinokuphembelela ukukhula kwe-biofilm okanye ukuthintela kwi-specimens yensimbi5.Ukongeza, uGuai et al.kwakhona kuphuculwe iipropathi ze-optical zeseli zelanga eziphilayo.I-6 Ke ngoko, ukucwangciswa kwe-laser kuvumela ukuveliswa kwezinto eziphezulu ze-high-resolution nge-ablation elawulwayo yezinto ezingaphezulu1.
Ubuchule obufanelekileyo bokuyila i-laser ukuvelisa ezo zakhiwo zomphezulu ngamaxesha athile kukuyilwa kwe-laser interference shaping (DLIP).I-DLIP isekelwe kuphazamiso olusondeleyo kumphezulu wemiqadi yelaser emibini okanye ngaphezulu ukwenza imiphezulu enepateni eneempawu kwi-micrometer kunye ne-nanometer range.Ngokuxhomekeke kwinani kunye ne-polarization ye-laser beams, i-DLIP inokuyila kwaye idale iindidi ezininzi zezakhiwo zomhlaba.Indlela ethembisayo kukudibanisa izakhiwo ze-DLIP kunye ne-laser-induced periodic surface structures (LIPSS) ukudala i-topography yomhlaba kunye ne-hierarchy eyinkimbinkimbi yesakhiwo8,9,10,11,12.Ngokwendalo, olu luhlu lubonakaliswe ukuba lubonelela ngokusebenza ngcono kuneemodeli zomgangatho omnye13.
Umsebenzi we-LIPSS uxhomekeke kwinkqubo yokuzazisa (ingxelo elungileyo) esekwe ekwenyukeni kohlengahlengiso olukufutshane nomphezulu wosasazo lobukhulu bemitha.Oku kungenxa yokwanda kwe-nanoroughness njengoko inani le-laser pulses esetyenzisiweyo linyuka ngo-14, 15, 16. Ukumodareyitha kwenzeka ikakhulu ngenxa yokuphazamiseka kwamaza okukhutshwa kunye nentsimi ye-electromagnetic field15,17,18,19,20,21 ye-refracted and amacandelo amaza asasazekileyo okanye iiplasmons zomhlaba.Ukuqulunqwa kwe-LIPSS kukwachatshazelwa lixesha le-pulses22,23.Ngokukodwa, amandla aphezulu e-laser ayimfuneko kunyango oluphezulu lwemveliso.Oku kudla ngokufuna ukusetyenziswa kwamazinga aphezulu okuphindaphinda, okt kuluhlu lweMHz.Ngenxa yoko, umgama wexesha phakathi kwee-laser pulses mfutshane, nto leyo ekhokelela kwiziphumo zokuqokelela ubushushu 23, 24, 25, 26. Esi siphumo sikhokelela ekunyukeni ngokubanzi kwiqondo lokushisa eliphezulu, elinokuthi lichaphazele kakhulu indlela yokwenza ipateni ngexesha lokuchithwa kwe-laser.
Kumsebenzi wangaphambili, uRudenko et al.kunye noTzibidis et al.Indlela yokwakhiwa kwezakhiwo eziguquguqukayo zixutyushwa, ekufuneka zibaluleke ngakumbi njengoko ukuqokelela kobushushu kwanda19,27.Ukongeza, uBauer et al.Nxulumanisa ubungakanani obubalulekileyo bokuqokelelwa kobushushu kunye nezakhiwo zomphezulu wemicron.Ngaphandle kwale nkqubo yolwakhiwo olukhuthazwa ngubushushu, kukholelwa ngokubanzi ukuba imveliso yenkqubo inokuphuculwa nje ngokunyusa izinga lokuphindaphinda28.Nangona oku, kwakhona, akunakufezekiswa ngaphandle kokunyuka okukhulu kokugcinwa kobushushu.Ngoko ke, izicwangciso zenkqubo ezibonelela nge-multilevel topology ayinakuphatheka kumazinga aphezulu okuphindaphinda ngaphandle kokutshintsha inkqubo yekinetics kunye nokwakheka kwesakhiwo9,12.Kule nkalo, kubaluleke kakhulu ukuphanda indlela ukushisa kwe-substrate okuchaphazela ngayo inkqubo yokwakheka kwe-DLIP, ngakumbi xa usenza iipateni zomgangatho owenziweyo ngenxa yokubunjwa kwangaxeshanye kwe-LIPSS.
Injongo yolu phononongo yayikukuvavanya isiphumo sobushushu be-substrate kwisiphumo somphezulu womhlaba ngexesha lokusetyenzwa kwe-DLIP yensimbi engenasici kusetyenziswa i-ps pulses.Ngexesha lokucubungula i-laser, ubushushu besampulu ye-substrate yalethwa ukuya kwi-250 \ (^\ circ \)C usebenzisa i-heater plate.Izakhelo zomphezulu ezibe neziphumo zaphawulwa kusetyenziswa imakroskopu edibeneyo, i-electron microscopy yokuskena, kunye ne-X-reyi yokuchitha amandla amandla.
Kuluhlu lokuqala lweemvavanyo, i-substrate yensimbi yayicutshungulwa ngokusetyenziswa kwe-DLIP ye-DLIP ye-beam ezimbini kunye nexesha lendawo ye-4.5 µm kunye nokushisa kwe-substrate ye-(T_{\mathrm {s}}\) 21 \ (^ {\ circ }\)C, emva koku kubhekiselwa kuwo "njengomphezulu" ongatshisi.Kule meko, i-pulse overlap \(o_{\mathrm {p}}\) ngumgama phakathi kwee-pulses ezimbini njengomsebenzi wobungakanani bendawo.Ihluka ukusuka kwi-99.0% (i-100 pulses kwindawo nganye) ukuya kwi-99.67% (i-300 pulses kwindawo nganye).Kuzo zonke iimeko, i-peak energy density \ (\ Phi _\mathrm {p}\) = 0.5 J / cm \ (^ 2 \) (kwi-Gaussian elinganayo ngaphandle kokuphazamiseka) kunye nokuphindaphinda okuphindaphindiweyo f = 200 kHz kwasetyenziswa.Isalathiso se-polarization ye-laser beam ihambelana nokuhamba kwetafile yokumisa (umzobo 1a)), ehambelana nolwalathiso lwejometri yomgca owenziwe ngepatheni yokuphazamiseka kwemiqadi emibini.Imifanekiso emele yezakhiwo ezifunyenweyo ngokusebenzisa i-microscope ye-electron yokuskena (SEM) iboniswe kwiMifanekiso.1a–c.Ukuxhasa uhlalutyo lwemifanekiso ye-SEM ngokwendlela yokuma komhlaba, iinguqu ze-Fourier (FFTs, eziboniswe kwiindawo ezimnyama) zenziwa kwizakhiwo ezivavanywayo.Kuzo zonke iimeko, iziphumo zejiyometri ye-DLIP yabonakala ngexesha lesithuba se-4.5 µm.
Kwimeko \(o_{\mathrm {p}}\) = 99.0% kwindawo emnyama yeFig.I-1a, ehambelana nendawo yokuphazamiseka okuphezulu, umntu unokubona i-grooves equkethe izakhiwo ezincinci ezihambelanayo.Zitshintshana ngeebhendi eziqaqambileyo ezigqunywe kwi-nanoparticle-like topography.Ngenxa yokuba i-parallel structure phakathi kweegrooves ibonakala i-perpendicular kwi-polarization ye-laser beam kwaye inexesha elithile \(\Lambda _{\mathrm {LSFL-I}}\) 418\(\pm 65\) nm, kancinane. ngaphantsi kwe-wavelength ye-laser \ (\ lambda\) (532 nm) inokubizwa ngokuba yi-LIPSS kunye ne-spatial frequency ephantsi (LSFL-I) 15,18.I-LSFL-I ivelisa into ebizwa ngokuba yi-s-type signal kwi-FFT, "s" i-scattering15,20.Ngoko ke, isignali i-perpendicular kwi-vertical central vertical element, leyo iphinda yenziwe yi-DLIP isakhiwo (\(\Lambda _{\mathrm {DLIP}}\) \(\ approx\) 4.5 µm).Isibonakaliso esiveliswe ngumgca wendlela ye-DLIP yepateni kumfanekiso weFFT ubizwa ngokuba yi "DLIP-uhlobo".
Imifanekiso ye-SEM yezakhiwo zomhlaba ezenziwe kusetyenziswa i-DLIP.Ubuninzi bamandla obuphezulu \(\ Phi _\mathrm {p}\) = 0.5 J / cm\(^2\) (kwi-Gaussian engekho-ingxolo elinganayo) kunye nesantya sokuphindaphinda f = 200 kHz.Imifanekiso ibonisa ubushushu besampulu, i-polarization kunye nokwaleka.Ukuhamba kwesigaba sendawo kuphawulwe ngotolo olumnyama ku (a).I-inset emnyama ibonisa iFFT ehambelanayo efunyenwe kwi-37.25\(\ amaxesha\)37.25 µm SEM umfanekiso (oboniswe de i-wavevector ibe \(\vec {k}\cdot (2\pi )^ {-1}\) = 200 nm).Iiparamitha zenkqubo zibonakaliswe kumzobo ngamnye.
Ukujonga ngakumbi kuMfanekiso 1, unokubona ukuba njengoko \(o_{\mathrm {p}}\) i-overlap inyuka, isiginali ye-sigmoid igxininiswe ngakumbi kwi-x-axis yeFFT.Enye i-LSFL-I ithande ukuhambelana ngakumbi.Ukongezelela, ukunyanzeliswa kobudlelwane bohlobo lwe-s-uphawu lwehla kwaye ukuqina kohlobo lwe-DLIP lwanda.Oku kungenxa yemingxuma evakaliswa ngokwandayo ngokudibana okungaphezulu.Kwakhona, umqondiso we-x-axis phakathi kohlobo s kunye nombindi kufuneka uvele kwisakhiwo esinolungelelwaniso olufanayo njenge-LSFL-I kodwa sinexesha elide (\(\Lambda _\mathrm {b}\) \(\ approx \ ) 1.4 ± 0.2 µm) njengoko kubonisiwe kuMfanekiso 1c).Ngoko ke, kucingelwa ukuba ukubunjwa kwabo kungumzekelo wemigodi embindini womsele.Uphawu olutsha lukwavela kuluhlu oluphezulu lwamaza (i-wavenumber enkulu) yolungelelwaniso.Umqondiso uvela kwi-ripples parallel kwimithambeka yomsele, mhlawumbi ngenxa yokuphazamiseka kwesiganeko kunye nokukhanya okubonakaliswe phambili kwi-slopes9,14.Koku kulandelayo, ezi ripples zichazwa LSFL \ (_ \ mathrm {edge} \), kunye nemiqondiso yabo - ngohlobo -s \ (_ {\ mathrm {p)) \).
Kuvavanyo olulandelayo, iqondo lobushushu lesampulu lanyuswa laya kuthi ga kwi-250 °C phantsi kwendawo ebizwa ngokuba “yishushu”.Ulwakhiwo lwenziwe ngokwesicwangciso esifanayo sokusebenza njengeemvavanyo ezikhankanywe kwicandelo langaphambili (Imifanekiso 1a-1c).Imifanekiso ye-SEM ibonisa i-Topography enesiphumo njengoko kubonisiwe kumfanekiso 1d–f.Ukufudumeza isampuli kwi-250 C kukhokelela ekwandeni kokubonakala kwe-LSFL, ulwalathiso oluhambelana ne-laser polarization.Ezi zakhiwo zinokubonakaliswa njenge-LSFL-II kwaye zinexesha lesithuba \(\Lambda _\mathrm {LSFL-II}\) ye-247 ± 35 nm.Isiginali ye-LSFL-II ayiboniswa kwiFFT ngenxa yemowudi ephezulu.Njengoko \ (o_{\ mathrm {p}} \) inyuke ukusuka kwi-99.0 ukuya kwi-99.67 \ (\%\) (Umfanekiso 1d-e), ububanzi bendawo yebhanti eqaqambileyo yanda, eyakhokelela ekubonakaleni kwesignali ye-DLIP. ngaphezulu kweefrikhwensi eziphezulu.amanani amaza (amaza asezantsi) kwaye ngaloo ndlela tshintshela kumbindi weFFT.Imiqolo yemigodi kwi-Fig. 1d ingaba yi-precursors ye-grooves ebizwa ngokuba yi-perpendicular to LSFL-I22,27.Ukongeza, i-LSFL-II ibonakala ibe mfutshane kwaye imile ngendlela engaqhelekanga.Qaphela kwakhona ukuba ubungakanani obuqhelekileyo beebhendi ezikhanyayo kunye ne-nanograin morphology incinci kule meko.Ukongezelela, ukusabalalisa ubungakanani bezi nanoparticles kwajika kwasasazeka kancinci (okanye kukhokele kwi-particle agglomeration) ngaphandle kokufudumeza.Ngokomgangatho, oku kunokuvavanywa ngokuthelekisa amanani 1a, d okanye b, e, ngokulandelelanayo.
Njengoko uthungelwano \(o_{\mathrm {p}}\) lusanda ngakumbi ukuya kuma-99.67% (Fig. 1f), i-topography eyahlukileyo ngokuthe ngcembe yavela ngenxa yemisele ecacileyo.Nangona kunjalo, le grooves ibonakala ingacwangciswanga kwaye ingaphantsi kakhulu kunomfanekiso we-1c.Umahluko ophantsi phakathi kokukhanya kunye neendawo ezimnyama zomfanekiso ubonisa umgangatho.Ezi ziphumo zixhaswa ngakumbi ngophawu olubuthathaka kunye nolusasazeke ngakumbi lwe-FFT elungelelanisiweyo kuMfanekiso 1f xa kuthelekiswa neFFT kwi-c.Iistriae ezincinci zikwabonakala ekufudumezeni xa kuthelekiswa iFigure 1b kunye ne-e, eyathi kamva yaqinisekiswa yi-confocal microscopy.
Ukongeza kuvavanyo lwangaphambili, i-polarization ye-laser beam yajikeleza nge-90 \ ( ^ {\ circ} \), eyabangela ukuba ulwalathiso lwe-polarization luhambe nge-perpendicular kwi-platform yokumisa.Kwikhiwane.I-2a-c ibonisa amanqanaba okuqala okubunjwa kwesakhiwo, \(o_{\mathrm {p}}\) = 99.0% kwi-unnheated (a), ishushu (b) kunye nokufudumala 90\(^{\ circ}\ ) - Ityala ngepolarization ejikelezayo (c).Ukubona i-nanotopography yezakhiwo, iindawo eziphawulwe ngezikwere ezinemibala ziboniswa kwiMifanekiso.2d, kwisikali esandisiweyo.
Imifanekiso ye-SEM yezakhiwo zomhlaba ezenziwe kusetyenziswa i-DLIP.Iiparamitha zenkqubo ziyafana nakwiFig.1.Umfanekiso ubonisa isampuli yobushushu \(T_s\), i-polarization kunye ne-pulse overlap \ (o_\mathrm {p}\).Iseti emnyama kwakhona ibonisa uguqulo oluhambelana neFourier.Imifanekiso eku-(d)-(i) kukwandiswa kweendawo eziphawulweyo ku-(a)-(c).
Kule meko, kunokubonwa ukuba izakhiwo ezikwiindawo ezimnyama ze-Fig. Umzobo we-2g, i), onokubonwa kwi-orientation ye-s-type signal kwi-FFT ehambelanayo.I-bandwidth yexesha le-LSFL-I ibonakala inkulu xa kuthelekiswa nexesha b, kwaye uluhlu lwayo lutshintshelwe kumaxesha amancinci kwi-Fig.Ngaloo ndlela, eli xesha lilandelayo lesithuba se-LSFL linokubonwa kwisampulu kumaqondo obushushu ahlukeneyo: \(\Lambda _{\mathrm {LSFL-I}}\) = 418\(\pm 65\) nm kwi-21 ^{\circ }\ )C (Fig. 2a), \(\Lambda _{\mathrm {LSFL-I}}\) = 445\(~\pm\) 67 nm kunye \(\Lambda _{\mathrm {LSFL-II) }} \) = 247 ± 35 nm kwi-250 ° C (Umfanekiso 2b) we-s polarization.Ngokuchasene noko, ixesha lesithuba se-p-polarization kunye no-250 \(^{\circ }\)C lilingana no \(\Lambda _{\mathrm {LSFL-I))\)\) = 390\(\pm 55\ ) nm kunye \(\ Lambda_{\mathrm{LSFL-II}}\) = 265±35 nm (Fig. 2c).
Ngokucacileyo, iziphumo zibonisa ukuba nje ngokunyusa ubushushu besampulu, i-morphology ye-surface inokutshintsha phakathi kwezinto ezimbini ezigqithisayo, kubandakanywa (i) umphezulu oqulethe izinto ze-LSFL-I kuphela kunye (ii) nendawo ehlanganiswe ne-LSFL-II.Ngenxa yokuba ukubunjwa kolu hlobo oluthile lwe-LIPSS kwimigangatho yesinyithi idibene nemigangatho ye-oxide yomhlaba, uhlalutyo lwe-X-ray lwe-energy dispersive (EDX) lwenziwa.Uluhlu loku-1 lushwankathela iziphumo ezifunyenweyo.Ukuzimisela ngakunye kuqhutywa nge-avareji yobuncinci i-spectra ezine kwiindawo ezahlukeneyo kumphezulu wesampulu esetyenzisiweyo.Imilinganiselo iqhutyelwa kwiisampuli ezahlukeneyo zokushisa \(T_\mathrm{s}\) kunye neendawo ezahlukeneyo zesampulu yomhlaba oqulethe iindawo ezingakhiwanga okanye ezicwangcisiweyo.Imilinganiselo nayo iqulethe ulwazi malunga neengqimba ezinzulu ze-oxidized ezilele ngokuthe ngqo ngaphantsi kwendawo etyhidiweyo edibeneyo, kodwa ngaphakathi kobunzulu bokungena kwe-electron yohlalutyo lwe-EDX.Nangona kunjalo, kufuneka kuqatshelwe ukuba i-EDX ilinganiselwe kumandla ayo okulinganisa umxholo we-oksijini, ngoko ke ezi xabiso apha zinokunika uvavanyo olusemgangathweni.
Izahlulo ezingaphendulwanga zeesampuli azizange zibonise inani elibalulekileyo le-oksijini kuwo onke amaqondo okushisa asebenzayo.Emva konyango lwe-laser, amanqanaba e-oksijini anyuka kuzo zonke iimeko31.Umahluko ekubunjweni kwesiseko phakathi kweesampulu ezimbini ezingaphathwanga njengoko bekulindelekile kwiisampulu zentsimbi zorhwebo, kwaye amaxabiso ekhabhoni aphezulu kakhulu afunyenwe xa kuthelekiswa nephepha ledatha lomenzi we-AISI 304 yentsimbi ngenxa yongcoliseko lwe-hydrocarbon32.
Ngaphambi kokuxoxa ngezizathu ezinokwenzeka zokunciphisa ubunzulu be-groove ablation kunye nokuguquka ukusuka kwi-LSFL-I ukuya kwi-LSFL-II, ubuninzi be-spectral density (PSD) kunye neeprofayili zokuphakama zisetyenziswa.
(i) I-quasi-two-dimensional normalized power spectral density (Q2D-PSD) yomphezulu iboniswa njengemifanekiso ye-SEM kwiMifanekiso 1 kunye ne-2. kuqondwa njengokwanda kwenxalenye eqhubekayo (k \(\le\) 0.7 µm\(^{-1}\), engaboniswanga), okt ukuguda.(ii) Iprofayili ehambelanayo yobude bomphezulu.Ubushushu besampula \ ( T_s \ ), ukugqithelana \ (o_{\ mathrm {p}}\), kunye ne-laser polarization E ngokumalunga nokuqhelaniswa \ (\vec {v}\) yentshukumo yeqonga lokumisa iboniswe kuzo zonke iiplani.
Ukulinganisa imbonakalo yemifanekiso ye-SEM, i-avareji ye-spectrum yamandla aqhelekileyo yenziwe ubuncinane kwimifanekiso emithathu ye-SEM kwipharamitha nganye emiselwe ngokuyi-avareji yonke i-one-dimensional (1D) ye-spectral power densities (PSDs) kwi-x okanye y icala.Igrafu ehambelanayo iboniswe kwi-Fig. 3i ebonisa ukutshintshwa rhoqo kwesignali kunye negalelo layo elihambelanayo kwi-spectrum.
Kwikhiwane.3ia, c, e, incopho ye-DLIP ikhula kufutshane \(k_{\mathrm {DLIP}}~=~2\pi\) (4.5 µm)\(^{-1}\) = 1.4 µm \ ( ^{- 1}\) okanye i-harmonics ephezulu ehambelanayo njengoko ukudibana kuyanda \(o_{\mathrm {p))\).Ukwanda kwe-amplitude esisiseko yayanyaniswa nophuhliso olunamandla lwesakhiwo se-LRIB.I-amplitude yee-harmonics eziphezulu zinyuka ngokunyuka kwethambeka.Kwimisebenzi yoxande njengeemeko ezinciphisayo, uqikelelo lufuna elona nani likhulu lefrikhwensi.Ke ngoko, incopho ejikeleze i-1.4 µm\(^{-1}\) kwi-PSD kunye ne-harmonics ehambelanayo ingasetyenziswa njengemilinganiselo yomgangatho wemilo yegroove.
Ngokuchasene noko, njengoko kubonisiwe kwi-Fig. 3 (i) b,d,f, i-PSD yesampuli eshushu ibonisa iincopho ezibuthathaka kunye ezibanzi kunye nomqondiso omncinci kwii-harmonics ezifanelekileyo.Ukongeza, kumkhiwane.I-3(i)f ibonisa ukuba isignali ye-harmonic yesibini ide igqithe isignali esisiseko.Oku kubonakalisa ubume be-DLIP obungaqhelekanga kwaye bungabonakali kakhulu kwisampulu eshushu (xa kuthelekiswa ne \(T_s\) = 21\(^\circ\)C).Olunye uphawu kukuba njengoko ukugqithelana \(o_{\mathrm {p}}\) kunyuka, isiphumo se-LSFL-I siginali sitshintshela kwi-wavenumber encinci (ixesha elide).Oku kunokuchazwa ngokunyuka kwenyuka kwemida yemodi ye-DLIP kunye nokunyuka kwendawo ehambelana nayo kwi-angle ye-icidence14,33.Ukulandela lo mkhwa, ukwandiswa komqondiso we-LSFL-I nako kunokuchazwa.Ukongeza kwimithambeka enqabileyo, kukho neendawo ezithe tyaba phantsi nangaphezulu kweekresti zesakhiwo se-DLIP, okuvumela uluhlu olubanzi lwexesha le-LSFL-I.Kwizinto ezifunxa kakhulu, ixesha le-LSFL-I lidla ngokuqikelelwa ngolu hlobo:
apho \(\theta\) yi-engile yesiganeko, kwaye abarhuma s kunye no-p babhekisa kwiipolarizations ezahlukeneyo33.
Kufuneka kuqatshelwe ukuba i-plane yeziganeko zokucwangciswa kwe-DLIP ngokuqhelekileyo i-perpendicular ekuhambeni kweqonga lokumisa, njengoko kuboniswe kwi-Figure 4 (jonga i-Materials and Methods section).Ngoko ke, i-s-polarization, njengomthetho, ihambelana nokuhamba kwesiteji, kwaye i-p-polarization i-perpendicular kuyo.Ngokweequation.(1), i-s-polarization, ukusasazeka kunye nokutshintshwa kwe-LSFL-I isignali ukuya kumanani amancinci amancinci kulindeleke.Oku kungenxa yokwanda kwe \(\theta\) kunye noluhlu lwe-angular \(\theta \pm \delta \theta\) njengoko ubunzulu bomsele busanda.Oku kunokubonwa ngokuthelekisa iincopho zeLSFL-I kwiFig. 3ia,c,e.
Ngokweziphumo eziboniswe kwifig.1c, LSFL\(_\mathrm {edge}\) ikwabonakala kwiPSD ehambelanayo kwifig.3ie.Kwikhiwane.I-3ig,h ibonisa i-PSD ye-p-polarization.Umahluko kwiincopho ze-DLIP zibonakala ngakumbi phakathi kweesampulu ezishushu kunye nezingatshisiyo.Kule meko, isignali evela kwi-LSFL-I idibanisa kunye ne-harmonics ephezulu ye-DLIP peak, yongeza kwisignali kufuphi ne-lasing wavelength.
Ukuxoxa ngeziphumo ngokweenkcukacha ezithe vetshe, kuMfanekiso 3ii ubonisa ubunzulu besakhiwo kunye nokudibana phakathi kwee-pulses ze-DLIP linear height distribution kumaqondo obushushu ahlukeneyo.Iprofayile yobude obuthe nkqo bomphezulu ifunyenwe nge-avareji yeeprofayili zobude obuthe nkqo obuzimeleyo obujikeleze umbindi wesakhiwo se-DLIP.Kwiqondo lokushisa ngalinye elisetyenzisiweyo, ubunzulu besakhiwo buyanda ngokunyuka kwe-pulse overlap.Iprofayile yesampulu eshushu ibonisa iigrooves ezine-peak-to-peak (pvp) amaxabiso e-0.87 µm ye-s-polarization kunye ne-1.06 µm ye-p-polarization.Ngokwahlukileyo, i-s-polarization kunye ne-p-polarization yesampulu engatshisiyo ibonisa i-pvp ye-1.75 µm kunye ne-2.33 µm, ngokulandelelanayo.I-pvp ehambelanayo iboniswe kwiprofayili yobude kwifig.3ii.Umndilili ngamnye wePvP ubalwa nge-avareji yee-PvP ezisibhozo.
Ukongeza, kumkhiwane.I-3iig, h ibonisa ubude bokusabalalisa i-p-polarization perpendicular to positioning system and groove movement.Umkhombandlela we-p-polarization unempembelelo entle kubunzulu bomsele njengoko ukhokelela kwi-pvp ephezulu kancinci kwi-2.33 µm xa kuthelekiswa ne-s-polarization kwi-1.75 µm pvp.Oku kuhambelana ne-grooves kunye nokuhamba kwenkqubo yeqonga lokumisa.Esi siphumo sinokubangelwa yisakhiwo esincinci kwimeko ye-s-polarization xa kuthelekiswa nemeko ye-p-polarization (jonga umfanekiso we-2f, h), eya kuxoxwa ngakumbi kwicandelo elilandelayo.
Injongo yengxoxo kukuchaza ukuhla kobunzulu be-groove ngenxa yotshintsho kwiklasi ye-LIPS engundoqo (LSFL-I ukuya kwi-LSFL-II) kwimeko yeesampuli ezishushu.Ngoko phendula le mibuzo ilandelayo:
Ukuphendula umbuzo wokuqala, kuyimfuneko ukuqwalasela iindlela ezijongene nokunciphisa ukukhutshwa.Ngokubetha kwentliziyo enye kwisehlo esiqhelekileyo, ubunzulu bokukhutshwa kwamanzi bunokuchazwa ngolu hlobo:
apho \(\delta _{\mathrm {E}}\) bubunzulu bokungena kwamandla, \(\Phi\) kunye \(\Phi _{\mathrm {th}}\) kukutyibilika kokufunxa kunye ne-Ablation fluence umgubasi, ngokulandelelana34.
Ngokwezibalo, ubunzulu bokungena kwamandla kunempembelelo ephindaphindayo kubunzulu be-ablation, ngelixa utshintsho lwamandla lunesiphumo se-logarithmic.Ngoko ke utshintsho lwefluence aluchaphazeli \(\Delta z\) kangangoko \(\Phi ~\gg ~\Phi _{\mathrm {th}}\).Nangona kunjalo, i-oxidation eyomeleleyo (umzekelo, ngenxa yokubunjwa kwe-chromium oxide) ikhokelela kwiibhondi ze-Cr-O35 ezomeleleyo xa kuthelekiswa namabhondi e-Cr-Cr, ngaloo ndlela kwandisa i-ablation threshold.Ngenxa yoko, \(\Phi ~\gg ~\Phi _{\mathrm {th}}\) ayisanelisekanga, nto leyo ekhokelela ekuncipheni ngokukhawuleza kobunzulu bokukhupha amandla kunye nokuncipha koxinzelelo lwe-flux yamandla.Ukongezelela, ukulungelelaniswa phakathi kwemeko ye-oxidation kunye nexesha le-LSFL-II liyaziwa, elinokuchazwa ngotshintsho kwi-nanostructure ngokwayo kunye neempawu ezibonakalayo zobuso obubangelwa yi-oxidation yomhlaba30,35.Ngoko ke, ukuhanjiswa okuchanekileyo komphezulu we-absorption fluence \ (\ Phi\) ngenxa ye-dynamics eyinkimbinkimbi yokusebenzisana phakathi kwexesha lesakhiwo kunye nobukhulu be-oxide layer.Ngokuxhomekeke kwixesha, i-nanostructure ichaphazela kakhulu ukuhanjiswa kwe-flux yamandla afunnyiweyo ngenxa yokunyuka okubukhali kwintsimi, ukutshatyalaliswa kweeplasmons zomhlaba, ukuhanjiswa kokukhanya okungaqhelekanga okanye ukusabalalisa17,19,20,21.Ngoko ke, \(\Phi\) i-inhomogeneous ngamandla kufuphi nomphezulu, kwaye \(\delta _ {E}\) mhlawumbi ayisenakwenzeka ngomlinganiso omnye wokufunxa \(\ alpha = \delta _{\mathrm {opt} } ^ { -1} \ malunga \ ne-delta _{\mathrm {E}}^{-1}\) yevolumu epheleleyo ekufutshane nomphezulu.Ekubeni ubukhulu befilimu ye-oxide buxhomekeke kakhulu kwixesha lokuqiniswa [26], umphumo we-nomenclature uxhomekeke kubushushu besampulu.I-micrographs ebonakalayo eboniswe kuMzobo we-S1 kwi-Supplementary Material ibonisa utshintsho kwiipropati ezibonakalayo.
Ezi ziphumo ngokuyinxenye zichaza ubunzulu bomsele ongekho nzulu kwimeko yezakhiwo zomphezulu ezincinci kwiMifanekiso 1d,e kunye no-2b,c kunye no-3(ii)b,d,f.
I-LSFL-II iyaziwa ngokwenza kwi-semiconductors, i-dielectrics, kunye nezinto ezixhomekeke kwi-oxidation14,29,30,36,37.Kwimeko yokugqibela, ubukhulu bomaleko we-oxide ongaphezulu kubaluleke kakhulu30.Uhlalutyo lwe-EDX olwenziwayo lubonakalise ukubunjwa kwee-oxides zomhlaba kwindawo eyakhiweyo.Ke, kwiisampulu ezingatshisiyo, ioksijini yendawo ibonakala inegalelo ekubunjweni kwenxalenye yegesi yegesi kwaye ngokuyinxenye ukubunjwa kweeoksidi zomhlaba.Zombini ezi ziganeko zenza igalelo elibalulekileyo kule nkqubo.Ngokuchasene noko, kwiisampulu ezifudunyeziweyo, iioksidi zesinyithi zamazwe ahlukeneyo oxidation (SiO\(_{\mathrm {2}}\), Cr\(_{\mathrm {n}} \)O\(_{\mathrm { m}}\), Fe\(_{\mathrm {n}}\)O\(_{\mathrm {m}}\), NiO, njl.) zicacile 38 ngokuthanda.Ukongeza kwi-oxide efunekayo umaleko, ubukho be-subwavelength roughness, ikakhulu i-spatial frequency LIPSS (HSFL), iyimfuneko ukwenza i-subwavelength efunekayo (d-type) intensity modes14,30.Imodi yokuqina ye-LSFL-II yokugqibela ngumsebenzi we-HSFL amplitude kunye nobukhulu be-oxide.Isizathu salo modi kukuphazamiseka kwebala elikude lokukhanya okuhlakazekileyo yi-HSFL kunye nokukhanya okuhlanjululwayo kwizinto eziphathekayo kunye nokusabalalisa ngaphakathi kwendawo ye-dielectric material20,29,30.Imifanekiso ye-SEM yomda wepatheni yomhlaba kwi-Figure S2 kwicandelo lezinto ezongezelelweyo zibonisa i-HSFL esele ikhona.Lo mmandla wangaphandle uchaphazeleka buthathaka ngumda wokusabalalisa ukuqina, okuvumela ukubunjwa kweHSFL.Ngenxa ye-symmetry yonikezelo lobungakanani, esi siphumo siyenzeka kwakhona kwicala lokuskena.
Ukufudumala kwesampuli kuchaphazela inkqubo yokwakheka kwe-LSFL-II ngeendlela ezininzi.Kwelinye icala, ukwanda kweqondo lobushushu kwisampulu \(T_\mathrm{s}\) kunempembelelo enkulu kakhulu kumyinge wokuqiniswa kunye nokupholisa kunobunzima bomaleko otyhidiweyo26.Ke, ujongano lolwelo lwesampulu eshushu luvezwa kwioksijini yendawo ixesha elide.Ukongeza, ukulibaziseka kokuqina kuvumela ukuphuhliswa kweenkqubo eziyinkimbinkimbi ze-convective ezandisa ukuxuba i-oksijini kunye nee-oxides nge-steel26 yamanzi.Oku kunokubonakaliswa ngokuthelekisa ubukhulu bomaleko we-oxide owenziwe kuphela ngokusasazwa (\(\Lambda _\mathrm {diff}=\sqrt{D~\times ~t_\mathrm {s}}~\le ~15\) nm) Ixesha elihambelanayo lokudibanisa yi \(t_\mathrm {s}~\le ~200\) ns, kunye nomlinganiso wokusasazwa \(D~\le\) 10\(^{-5}\) cm\(^ 2 \ )/ s) Ubungqingqwa obuphezulu ngokuphawulekayo bujongwe okanye bufuneka kulwakhiwo lwe-LSFL-II30.Ngakolunye uhlangothi, ukufudumeza kuchaphazela ukubunjwa kwe-HSFL kwaye ngoko ke izinto ezisasazwayo ezifunekayo ekutshintsheni kwi-LSFL-II d-type intensity mode.Ukubonakaliswa kwe-nanovoids ebanjwe ngaphantsi kwendawo kubonisa ukubandakanyeka kwabo ekubunjweni kwe-HSFL39.Ezi ziphene zinokumela imvelaphi ye-electromagnetic ye-HSFL ngenxa yeepateni zoxinzelelo oluphezulu olufunekayo14,17,19,29.Ukongeza, ezi ndlela ziveliswayo zokuqina zifana ngakumbi kunye nenani elikhulu le-nanovoids19.Ngaloo ndlela, isizathu sokunyuka kwesiganeko se-HSFL sinokuchazwa ngotshintsho kwi-dynamics ye-crystal defects njengoko \ (T_\mathrm{s}\) yanda.
Kutshanje kuye kwaboniswa ukuba izinga lokupholisa i-silicon yiparameter ephambili ye-intrinsic interstitial supersaturation kwaye ngoko ke ukuqokelela iziphene zamanqaku kunye nokwakhiwa kwe-dislocations40,41.Ukulinganisa kweemolekyuli zeentsimbi ezisulungekileyo kubonise ukuba izithuba zemisebenzi zigqithisa ngexesha lokwenziwa kwakhona kwekristali ngokukhawuleza, kwaye kungoko ukuqokelelwa kwezithuba kwisinyithi kuqhubeka ngendlela efanayo42,43,44.Ukongeza, izifundo zovavanyo zamva nje zesilivere zijolise kwindlela yokwenza i-voids kunye namaqela ngenxa yokuqokelela iziphene zamanqaku45.Ngoko ke, ukunyuka kweqondo lokushisa kwesampuli \ (T_\mathrm {s}\) kwaye, ngenxa yoko, ukuhla kwezinga lokupholisa kunokuchaphazela ukubunjwa kwe-voids, okuyi-nuclei ye-HSFL.
Ukuba izithuba zingabaphambili abayimfuneko kwimingxuma kwaye ngenxa yoko i-HSFL, ubushushu besampulu \(T_s\) kufuneka ibe neziphumo ezimbini.Ngakolunye uhlangothi, \ ( T_s \ ) ichaphazela izinga lokubuyisela kwakhona kwaye, ngenxa yoko, ukugxininiswa kweziphene zamanqaku (i-vacancy concentration) kwi-crystal ekhulile.Ngakolunye uhlangothi, kuchaphazela izinga lokupholisa emva kokuqina, ngaloo ndlela kuchaphazela ukusasazwa kweziphene zamanqaku kwi-crystal 40,41.Ukongeza, izinga lokuqiniswa lixhomekeke kwi-crystallographic orientation kwaye ngaloo ndlela i-anisotropic ephezulu, njengokuba i-disfusion of point defects42,43.Ngokwale ndawo, ngenxa yempendulo ye-anisotropic yemathiriyeli, intsebenziswano yokukhanya kunye nomcimbi iba yi-anisotropic, ethi yona ikhulise oku kukhutshwa kwamandla ngamaxesha athile.Kwiimathiriyeli ze-polycrystalline, oku kuziphatha kunokunciphisa ubukhulu bengqolowa enye.Enyanisweni, ukubunjwa kwe-LIPSS kubonisiwe ngokuxhomekeke kwi-reactionation yeenkozo46,47.Ngoko ke, umphumo wokushisa kwesampuli \ ( T_s \ ) kwizinga le-crystallization lingabi namandla njengomphumo we-grain orientation.Ngaloo ndlela, ukuqhelaniswa kwe-crystallographic okuhlukeneyo kweenkozo ezahlukeneyo kunika inkcazo enokubakho yokunyuka kwe-voids kunye nokuhlanganiswa kwe-HSFL okanye i-LSFL-II, ngokulandelanayo.
Ukucacisa izibonakaliso zokuqala zale ngcamango, iisampulu ezikrwada zabhalwa ukubonisa ukubunjwa kweenkozo kufutshane nomphezulu.Ukuthelekiswa kweenkozo kwifig.I-S3 iboniswe kwimathiriyeli eyongezelelweyo.Ukongezelela, i-LSFL-I kunye ne-LSFL-II yabonakala kumaqela kwiisampuli ezishushu.Ubungakanani kunye nejometri yala maqela ahambelana nobukhulu beenkozo.
Ngaphezu koko, i-HSFL yenzeka kuphela kuluhlu olumxinwa kuxinzelelo oluphantsi lokuhamba ngenxa yemvelaphi yayo eguqukayo19,29,48.Ke ngoko, kuvavanyo, oku kunokwenzeka kuphela kumda weprofayile yomqadi.Ngoko ke, i-HSFL yenziwe kwiindawo ezingenayo i-oxidized okanye i-oxidized engenamandla, eyaye yabonakala xa ithelekisa amaqhezu e-oxide eesampuli eziphathwayo kunye nezingaphathwanga (jonga i-table reftab: umzekelo).Oku kuqinisekisa ingqikelelo yokuba umaleko we-oxide ubangelwa ikakhulu yi-laser.
Ngenxa yokuba ukubunjwa kwe-LIPSS ngokuqhelekileyo kuxhomekeke kwinani lee-pulses ngenxa yempendulo ye-inter-pulse, i-HSFL inokutshintshwa ngezakhiwo ezinkulu njengoko i-pulse overlap inyuka19.I-HSFL engaphantsi kwesiqhelo ibangela ipateni yokuqina engaphantsi rhoqo (d-mode) efunekayo ukuze kuqulunqwe i-LSFL-II.Ngoko ke, njengoko ukugqithiswa kwe \ (o_\mathrm {p}\) kwandisa (jonga umzobo 1 ukusuka kwi-de), isiqhelo se-LSFL-II siyancipha.
Olu phononongo luphande isiphumo sobushushu be-substrate kumphezulu we-morphology ye-laser eyakhiwe nge-DLIP ephathwa ngentsimbi engenanto.Kufunyaniswe ukuba ukufudumeza i-substrate ukusuka kwi-21 ukuya kwi-250 ° C kukhokelela ekunciphiseni ubunzulu be-ablation ukusuka kwi-1.75 ukuya kwi-0.87 µm kwi-s-polarization kwaye ukusuka kwi-2.33 ukuya kwi-1.06 µm kwi-p-polarization.Oku kuncipha kubangelwa utshintsho kuhlobo lwe-LIPSS ukusuka kwi-LSFL-I ukuya kwi-LSFL-II, ehambelana ne-laser-induced surface oxide layer kwiqondo lokushisa eliphezulu.Ukongeza, i-LSFL-II inokunyusa i-threshold flux ngenxa yokwanda kwe-oxidation.Kucingelwa ukuba kule nkqubo yetekhnoloji ene-pulse overlap, i-avareji yoxinaniso lwamandla kunye nesantya somndilili wokuphindaphinda, ukwenzeka kwe-LSFL-II kukwamiselwa lutshintsho kwi-dislocation dynamics ebangelwa yisampula yokufudumeza.Ukudityaniswa kwe-LSFL-II kucingelwa ukuba kubangelwa yi-grain orientation-dependent nanovoid formation, ekhokelela kwi-HSFL njenge-precursor ye-LSFL-II.Ukongezelela, impembelelo yesalathiso se-polarization kwixesha lesakhiwo kunye ne-bandwidth yexesha lolwakhiwo lufundwa.Kuvela ukuba i-p-polarization isebenze ngakumbi kwinkqubo ye-DLIP ngokobunzulu be-ablation.Ngokubanzi, olu phononongo lutyhila iseti yeeparamitha zenkqubo ukulawula kunye nokwandisa ubunzulu be-DLIP ablation ukwenza iipateni zomhlaba ezilungelelanisiweyo.Ekugqibeleni, utshintsho olusuka kwi-LSFL-I ukuya kwi-LSFL-II luqhutywa ngubushushu ngokupheleleyo kwaye ukunyuka okuncinci kwizinga lokuphindaphinda kulindeleke kunye ne-pulse overlap eqhubekayo ngenxa yokwanda kokushisa kwe24.Zonke ezi nkalo zihambelana nomngeni ozayo wokwandisa inkqubo ye-DLIP, umzekelo ngokusetyenziswa kwe-polygonal scanning systems49.Ukunciphisa ukwanda kobushushu, eli qhinga lilandelayo lingalandelwa: gcina isantya sokuskena se-polygonal scanner siphezulu kangangoko, uthatha ithuba lobungakanani bendawo yelaser enkulu, i-orthogonal ukuya kwicala lokuskena, kunye nokusetyenziswa kolona ncedo luphezulu.ngokutyibilikayo 28. Ukongeza, ezi ngcinga zivumela ukuyilwa kobume bendawo entsonkothileyo obuphezulu bomgangatho ophezulu wokusebenza kusetyenziswa i-DLIP.
Kulo cwaningo, iiplati zensimbi ezingenasici ze-electropolished (X5CrNi18-10, 1.4301, AISI 304) 0.8 mm ubukhulu zisetyenzisiwe.Ukususa nayiphi na into engcolileyo ebusweni, iisampuli zihlanjwe ngokucophelela nge-ethanol ngaphambi kokuba unyango lwe-laser (i-concentration epheleleyo ye-ethanol \ (\ ge \) 99.9%).
Ukusetwa kwe-DLIP kuboniswe kuMzobo 4. Iisampulu zakhiwa kusetyenziswa inkqubo ye-DLIP exhotyiswe nge-12 ps ultrashort pulsed laser source kunye ne-wavelength ye-532 nm kunye nesantya esiphezulu sokuphindaphinda i-50 MHz.Ukuhanjiswa kwendawo yamandla ombane yiGaussian.I-optics eyenzelwe ngokukodwa ibonelela ngokucwangciswa kwe-interferometric ye-double-beam ukudala izakhiwo zemigca kwisampulu.Ilensi enobude obugxininise obuyi-100 mm ibeka ngaphezulu imiqadi yelaser emibini eyongezelelweyo kumphezulu kwi-engile esisigxina ye-6.8\(^\circ\), enika ithuba lesithuba esimalunga ne-4.5 µm.Ulwazi oluthe kratya malunga nokuseta umfuniselo lunokufumaneka kwenye indawo50.
Ngaphambi kokucutshungulwa kwe-laser, isampuli ifakwe kwisitya sokufudumeza kwiqondo lokushisa elithile.Ubushushu besitya sokufudumeza bubekwe kwi-21 kunye ne-250 ° C.Kuzo zonke iimvavanyo, ijethi enqamlezileyo yomoya ocinezelweyo isetyenziswe ngokudityaniswa nesixhobo sokukhupha umoya ukuthintela ukubekwa kothuli kwi-optics.Isixokelelwano senqanaba le-x,y siyasetwa ukubeka isampulu ngexesha lolwakhiwo.
Isantya senkqubo yesigaba sokumisa sahluka ukusuka kwi-66 ukuya kwi-200 mm / s ukufumana ukugqithisa phakathi kwee-pulses ze-99.0 ukuya kwi-99.67 \ (\%\) ngokulandelanayo.Kuzo zonke iimeko, izinga lokuphindaphinda lilungiswe kwi-200 kHz, kwaye umlinganiselo wamandla wawuyi-4 W, eyanika amandla nge-pulse ye-20 μJ.Idayamitha ye-beam esetyenziswe kumfuniselo we-DLIP imalunga ne-100 µm, kwaye incopho yoxinaniso lwamandla e-laser yi-0.5 J/cm\(^{2}\).Itotali yamandla ekhutshiweyo kwindawo nganye yeyunithi yincopho yobuchule eqokelelweyo ehambelana ne-50 J/cm\(^2\) ye-\(o_{\mathrm {p}}\) = 99.0 \(\%\), 100 J/cm \(^2\) ye \(o_{\mathrm {p))\)=99.5\(\%\) kunye ne-150 J/cm\(^2\) ye\(o_{\mathrm {p}}\) ) = 99.67 \(\%\).Sebenzisa i-\(\lambda\)/2 ipleyiti ukutshintsha i-polarization ye-laser beam.Kwiseti nganye yeeparamitha ezisetyenzisiweyo, indawo emalunga ne-35 × 5 mm\(^{2}\) ibhalwe kwisampulu.Zonke iimvavanyo ezicwangcisiweyo zenziwa phantsi kweemeko ze-ambient ukuqinisekisa ukusetyenziswa kwemizi-mveliso.
I-morphology yeesampuli ihlolwe kusetyenziswa i-microscope edibeneyo kunye ne-50x yokukhulisa kunye nesisombululo se-optical and vertical of 170 nm kunye ne-3 nm, ngokulandelanayo.Idatha eqokelelweyo ye-Topographic emva koko yavavanywa kusetyenziswa isoftware yohlalutyo lomphezulu.Khupha iiprofayili kwidatha yomhlaba ngokwe-ISO 1661051.
Iisampulu zikwaphawulwe kusetyenziswa imakroskopu ye-electron yokuskena kumbane okhawulezayo we-6.0 kV.Ukwakhiwa kweekhemikhali zomphezulu weesampulu kwavavanywa kusetyenziswa i-X-ray-dispersive spectroscopy (EDS) eqhotyoshelweyo kumbane okhawulezayo we-15 kV.Ukongezelela, i-microscope ebonakalayo enenjongo ye-50x yayisetyenziselwa ukumisela i-morphology ye-granular ye-microstructure yeesampuli. Ngaphambi koko, iisampuli zifakwe kwiqondo lokushisa eliqhelekileyo le-50 \ ( ^ \ circ \ ) C imizuzu emihlanu kwi-stainless stain stain kunye ne-hydrochloric acid kunye ne-nitric acid concentration ye-15-20 \ (\%\) kunye ne-1 \ ( -<\)5 \(\%\), ngokulandelelanayo. Ngaphambi koko, iisampuli zifakwe kwiqondo lokushisa eliqhelekileyo le-50 \ ( ^ \ circ \ ) C imizuzu emihlanu kwi-stainless stain stain kunye ne-hydrochloric acid kunye ne-nitric acid concentration ye-15-20 \ (\%\) kunye ne-1 \ ( -<\)5 \(\%\), ngokulandelelanayo. Перед этим образцы травили при постоянной температуре 50 \(^\circ\)С в течение пяти минут в краске из нержавеюной температуре 15-20 \(\%\) kunye 1\( -<\)5 \( \%\) соответственно. Ngaphambi koko, iisampuli zifakwe kwiqondo lokushisa eliqhelekileyo le-50 \ ( ^ \ circ \ ) C imizuzu emihlanu kwipeyinti yensimbi engenasici kunye ne-hydrochloric kunye ne-nitric acid kunye ne-concentration ye-15-20 \ (\%\) kunye ne-1 \ ( -<\)5 \( \%\) ngokulandelelanayo.在此之前,樣品在不锈钢染色液中以50 \(^\circ\)C 的恒温蚀刻五分钟,盐酸和硝酸(浓度恶\15-20)\(1)\(1)\(1) (\%\),分别。在此之前,樣品在不锈钢染色液中以50 \(^\circ\)C (\%\),分别。Ngaphambi koko, iisampulu zihlanjululwe kwimizuzu emihlanu kwiqondo lokushisa eliqhelekileyo le-50 \ ( ^ \ circ \ ) C kwisisombululo sokucoca insimbi engenasici kunye ne-concentration ye-hydrochloric kunye ne-nitric acids 15-20 \ (\%\) kunye ne-1. \.(-<\)5 \ (\%\) соответственно. (-<\)5 \ (\%\) ngokulandelelanayo.
Umzobo weSchematic wokuseta umfuniselo wokuseta imiqadi emibini ye-DLIP, kubandakanywa (1) i-laser beam, (2) ipleyiti \(\lambda\)/2, (3) intloko ye-DLIP kunye noqwalaselo oluthile lwe-optical, (4) ) ipleyiti eshushu, (5) i-cross-fluidic , (6) x,y amanyathelo okumisa kunye (7) neesampulu zentsimbi engatyiwayo.Imiqadi emibini ebekwe phezulu, ejikelezwe ngombala obomvu ngasekhohlo, yenza izakhiwo zomgca kwisampulu kwi-engile \(2\theta\) (kubandakanywa zombini s- kunye ne-p-polarization).
Iiseti zedatha ezisetyenzisiweyo kunye/okanye ezihlalutyiweyo kuphononongo lwangoku ziyafumaneka kubabhali abachaphazelekayo ngesicelo esinengqiqo.


Ixesha lokuposa: Jan-07-2023